Multilayer film sputtering device 'S600'
Equipped with a heater stage (1000°C)! Usable for various applications from the development process to mass production.
The S600 is a multilayer sputtering device that contributes to the enhancement of electronic component quality and productivity through improvements in multilayer and stacked film deposition processes. By achieving high-quality and high-precision film deposition, it enhances device quality. It increases cost competitiveness through high throughput, improved production yield, and optimized material utilization efficiency. With options that accommodate various deposition conditions, it is capable of supporting small-batch production of diverse products and flexible production planning. 【Features】 - Equipped with up to 5 cathodes to achieve diverse processes and high productivity - Maintains long-term uniformity of film thickness through T/S distance adjustment - Improves sputtered thin film characteristics with unique plasma control (MP sputtering) technology - Capable of high-temperature processes with a heater stage (up to 1000°C) - Usable for various applications from development processes to mass production *For more details, please refer to the PDF document or feel free to contact us.
- Company：パナソニック プロダクションエンジニアリング
- Price：Other
